JPS50159968A - - Google Patents
Info
- Publication number
- JPS50159968A JPS50159968A JP6812574A JP6812574A JPS50159968A JP S50159968 A JPS50159968 A JP S50159968A JP 6812574 A JP6812574 A JP 6812574A JP 6812574 A JP6812574 A JP 6812574A JP S50159968 A JPS50159968 A JP S50159968A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812574A JPS50159968A (en]) | 1974-06-17 | 1974-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6812574A JPS50159968A (en]) | 1974-06-17 | 1974-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50159968A true JPS50159968A (en]) | 1975-12-24 |
Family
ID=13364700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6812574A Pending JPS50159968A (en]) | 1974-06-17 | 1974-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50159968A (en]) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52130661U (en]) * | 1976-03-30 | 1977-10-04 | ||
| JPS5314554A (en) * | 1976-07-26 | 1978-02-09 | Mitsubishi Metal Corp | Method of chamfering single crystal wafer |
| JPH03170933A (ja) * | 1990-10-15 | 1991-07-24 | Matsushita Electric Ind Co Ltd | 樹脂膜形成用板状基板 |
| JPH0513388A (ja) * | 1991-06-29 | 1993-01-22 | Toshiba Corp | 半導体ウエーハの製造方法 |
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1974
- 1974-06-17 JP JP6812574A patent/JPS50159968A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52130661U (en]) * | 1976-03-30 | 1977-10-04 | ||
| JPS5314554A (en) * | 1976-07-26 | 1978-02-09 | Mitsubishi Metal Corp | Method of chamfering single crystal wafer |
| JPH03170933A (ja) * | 1990-10-15 | 1991-07-24 | Matsushita Electric Ind Co Ltd | 樹脂膜形成用板状基板 |
| JPH0513388A (ja) * | 1991-06-29 | 1993-01-22 | Toshiba Corp | 半導体ウエーハの製造方法 |